Dr. Hiroshi Ikegami
at
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Reticles, Opacity, Q switching, Silicon, Laser ablation, YAG lasers, Optical alignment, Semiconducting wafers, Signal detection, Absorption

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Thin films, Metals, Laser applications, Laser irradiation, Laser ablation, Aluminum, Optical alignment, Semiconducting wafers, Plasma, Tin

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Thin films, Lithography, Optical lithography, Cameras, Video, Particles, Laser ablation, Optical alignment, Photoresist processing, Natural surfaces

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