Dr. Hiroshi Itoh
Senior Researcher at AIST
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | September 8, 2014
Proc. SPIE. 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
KEYWORDS: Semiconductors, Metrology, Calibration, Silicon, Atomic force microscopy, Transmission electron microscopy, Atomic force microscope, Critical dimension metrology, Photomicroscopy, System on a chip

SPIE Journal Paper | March 12, 2012
JM3 Vol. 11 Issue 1
KEYWORDS: Atomic force microscope, Carbon nanotubes, Atomic force microscopy, Silicon, Calibration, Cadmium, Sensors, Signal detection, Eye, Distortion

PROCEEDINGS ARTICLE | April 20, 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Oxides, Silica, Silicon, Image analysis, Atomic force microscopy, Transmission electron microscopy, Silicon films, Image transmission, Convolution, Semiconducting wafers

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Eye, Sensors, Calibration, Silicon, Distortion, Atomic force microscopy, Deconvolution, Critical dimension metrology, Signal detection, Cerium

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