Prof. Hiroshi Kawata
at High Energy Accelerator Research Organization KEK
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 September 2020 Presentation
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Mid-IR, Mirrors, Electron beams, Light sources, Magnetism, Extreme ultraviolet, Extreme ultraviolet lithography, Free electron lasers, Stochastic processes, Photomask technology

Proceedings Article | 12 October 2018 Presentation
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Near infrared, Electron beams, Light sources, Laser scanners, Extreme ultraviolet, Extreme ultraviolet lithography, 3D scanning, Free electron lasers, Stochastic processes

Proceedings Article | 16 October 2017 Presentation
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Semiconductors, Light sources, Superconductors, Extreme ultraviolet, Extreme ultraviolet lithography, Free electron lasers, EUV optics

Proceedings Article | 20 January 1993 Paper
Proc. SPIE. 1740, Optics for High-Brightness Synchrotron Radiation Beamlines
KEYWORDS: Iron, Microchannel plates, Crystals, X-rays, Magnetism, Liquid crystals, Laser crystals, Synchrotron radiation, Monochromators, Compton scattering

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