Mr. Hiroshi Miroku Profile

Hiroshi Miroku

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Publications (1)

Proceedings Article | 8 April 2019

Macro CDSEM 2D metrology supporting advanced DRAM patterning

R. Kris, G. Klebanov, I. Schwarzband, E. Sommer, L. Gershtein, B. Mathew, E. Noifeld, S. Levy, R. Alkoken, O. Novak, H. Miroku, D. Rathore , S. Pastur, S. Duvdevani-Bar, T. Bar-On, I. Horikawa

Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII

KEYWORDS: Mathematical modeling, Metrology, Optical lithography, Detection and tracking algorithms, Scanning electron microscopy, Process control, Image enhancement, Computer aided design, Critical dimension metrology, Algorithm development

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