Dr. Hiroshi Morita
Senior Researcher at AIST
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Fabrication, Lithography, Optical lithography, Polymers, Particles, Interfaces, Materials processing, Monte Carlo methods, Directed self assembly, Analytical research

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Nanotechnology, Lithography, Optical lithography, Polymers, Particles, Interfaces, Computer simulations, Monte Carlo methods, Directed self assembly, Polymer thin films

PROCEEDINGS ARTICLE | March 15, 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Lithography, Calibration, Polymers, Particles, Molecules, Photoresist materials, Line edge roughness, Photoresist processing, Photoresist developing, Polymer thin films

PROCEEDINGS ARTICLE | April 16, 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Polymers, Particles, Molecules, Interfaces, Computer simulations, Monte Carlo methods, Line edge roughness, Photoresist processing, Edge roughness, Liquids

SPIE Journal Paper | October 1, 2010
JM3 Vol. 9 Issue 04
KEYWORDS: Polymers, Particles, Liquids, Picosecond phenomena, Line edge roughness, Polymer thin films, Photoresist processing, Interfaces, Lithography, Computer simulations

PROCEEDINGS ARTICLE | March 26, 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Polymers, Particles, Interfaces, Diffusion, Line edge roughness, Photoresist processing, Polymer thin films, Edge roughness, Liquids

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top