Mr. Hiroshi Motomura Profile

Hiroshi Motomura

at Ricoh Co Ltd

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 5 March 2021 Presentation + Paper

New wavelength tuning strategy for realizing VCSEL wafers with highly uniform wavelength

Ryoichiro Suzuki, Hiroshi Motomura, Masayuki Fujiwara, Kazuki Nagasawa, Naoto Jikutani

Proceedings Volume 11704, 1170405 (2021) https://doi.org/10.1117/12.2576970

KEYWORDS: Vertical cavity surface emitting lasers, Semiconducting wafers, Wavelength tuning, Three dimensional sensing, Optical pumping, Optical lithography, Medium wave, Fabry–Perot interferometers, Etching, Epitaxy

Read Abstract +

Precise lasing wavelength control of VCSELs is attractive for several applications: 3D sensing, atomic clock, laser pumping, and the like. The wavelength of commercially available VCSELs is typically varied for each chip. This is because the thickness of epitaxial layers inevitably varies on a wafer due to the distribution of temperature and gas flow. VCSEL users on the module side have tolerated the problem. Here, we propose the novel strategy for precise wavelength control of VCSELs with simple fabrication by applying multi-wavelength (MW) VCSEL. We proposed two ways to achieve that. One is uniform wavelength method on wafer, and another is wavelength selection method. In both concepts, MW-VCSELs with wavelength-tuning-layer (WTL) inside DBR are suitable. Uniform wavelength method is followed by three steps: 1) A lower DBR, a cavity consisting of active layers, a first top DBR, and a WTL are grown. 2) The dip wavelength of the Fabry-Perot cavity is measured over the wafer. The WTL thickness is processed as to cancel out the wavelength variation in the two-dimensional data, which is performed by photolithography and etching techniques. 3) A remaining second top DBR is formed by regrowth technique to achieve more uniform wavelength than epitaxial growth alone. In our experiment, the reduction of wavelength variation from 6.6 nm (epitaxy only) to 2.0 nm was demonstrated. The concept can provide large scale array with uniform wavelength. Therefore, it is advantageous on high power applications as well as applications in which VCSELs with precise lasing wavelength are required. In wavelength selection method, precise wavelength is obtained by selecting emitters that met wavelength specification from emitters that are formed with different wavelengths by applying MW-VCSEL technology.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years