Dr. Hiroshi Nozue
President
SPIE Involvement:
Conference Program Committee | Author
Publications (20)

Proceedings Article | 30 October 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Photomasks, Error analysis, Double patterning technology, Lithography, Chromium, Scanners, Critical dimension metrology, Semiconducting wafers, Control systems, 193nm lithography

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Photomasks, Charged-particle lithography, Etching, Electron beam lithography, Reactive ion etching, Mask making, Nickel, Optical lithography, Plating, Lithography

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Photomasks, Charged-particle lithography, Semiconducting wafers, Electron beams, Contamination, Printing, Silicon, Critical dimension metrology, Mask cleaning, Vacuum ultraviolet

Proceedings Article | 16 June 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Charged-particle lithography, Photomasks, Semiconducting wafers, Lithography, Distortion, Scanning electron microscopy, Electron beams, Particles, Optical alignment, Electron beam lithography

Proceedings Article | 16 August 2002
Proc. SPIE. 4764, 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Charged-particle lithography, Photomasks, Semiconducting wafers, Electron beam lithography, Semiconductors, Projection lithography, Lithography, Optical alignment, Electron beams, X-ray lithography

Showing 5 of 20 publications
Conference Committee Involvement (6)
SPIE Photomask Technology
10 September 2013 | Monterey, California, United States
Photomask Technology
11 September 2012 | Monterey, California, United States
Photomask Technology
19 September 2011 | Monterey, California, United States
Photomask Technology
13 September 2010 | Monterey, California, United States
Photomask Technology
15 September 2009 | Monterey, California, United States
Showing 5 of 6 Conference Committees
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