Prof. Hiroshi Sakai
at High Energy Accelerator Research Organization KEK
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 September 2020 Presentation
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Mid-IR, Mirrors, Electron beams, Light sources, Magnetism, Extreme ultraviolet, Extreme ultraviolet lithography, Free electron lasers, Stochastic processes, Photomask technology

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