Hiroshi Umeda
Engineering Manager at Gigaphoton Inc
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 23 March 2011
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Lithography, Light sources, High power lasers, Reliability, Laser applications, Laser development, Ecology, Excimer lasers, Double patterning technology, Immersion lithography

Proceedings Article | 10 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, High power lasers, Reliability, Laser applications, Laser development, Laser stabilization, Excimer lasers, Double patterning technology, Immersion lithography, Pulsed laser operation

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Light sources, Optical amplifiers, Oscillators, High power lasers, Reliability, Laser applications, Excimer lasers, Double patterning technology, Immersion lithography, Fluorine

Proceedings Article | 11 April 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Light sources, Oscillators, High power lasers, Error analysis, Laser applications, Laser development, Power supplies, Laser stabilization, Excimer lasers, Double patterning technology

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Light sources, Metrology, Spectroscopy, High power lasers, Reliability, Laser applications, Laser development, Laser stabilization, Immersion lithography, Semiconducting wafers

Showing 5 of 9 publications
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