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Hirotaka Mizuno
at Tohoku Univ
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Publications (1)
Proceedings Article | 18 June 2004 Paper
Fabrication method of large-core polymeric optical waveguide through replication process using anisotropically etched silicon
Hirotaka Mizuno, Okihiro Sugihara, Toshikuni Kaino, Naomichi Okamoto, Masahiro Tomiki, Masahito Hoshino
Proceedings Volume 5351, (2004) https://doi.org/10.1117/12.533780
KEYWORDS: Silicon, Waveguides, Polymers, Polymer multimode waveguides, Etching, Anisotropic etching, Semiconducting wafers, Polymethylmethacrylate, Fabrication, Photomasks
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