Mr. Hirotaka Mizuno
at Tohoku Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | June 18, 2004
Proc. SPIE. 5351, Organic Photonic Materials and Devices VI
KEYWORDS: Fabrication, Polymethylmethacrylate, Waveguides, Etching, Polymers, Silicon, Photomasks, Semiconducting wafers, Anisotropic etching, Polymer multimode waveguides

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