Mr. Hiroyuki Egashira Profile

Hiroyuki Egashira

Manager at Nikon Corporation

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 31 March 2014 Paper

Immersion scanners enabling 10nm half-pitch production and beyond

Hiroyuki Egashira, Yusaku Uehara, Yosuke Shirata, Yuichi Shibazaki, Jun Ishikawa, Takayuki Funatsu, Masanori Ohba

Proceedings Volume 9052, 90521F (2014) https://doi.org/10.1117/12.2046238

KEYWORDS: Semiconducting wafers, Reticles, Distortion, Scanners, Wafer-level optics, Control systems, Wavefronts, Data modeling, Overlay metrology, Calibration

Read Abstract +

Nikon’s new immersion scanner “NSR-S630D” has been developed to deliver enhanced product overlay and CD uniformity while improving productivity at 10 nm half pitch node and beyond. The NSR-S630D is equipped with various advanced technologies. Among them are the new reticle stage with encoder servo control and advanced reticle bending mechanism, new optics with enhanced correction knobs for thermal aberration control, and advanced thermally stable wafer stage; all of which are key components to providing the best scanner solution to meet the requirements for 10 nm half pitch node and beyond. In this paper, we describe the NSR-630D development concept and the latest performance data at factory. One of the key factors in improving overlay is shot distortion; in order to improve shot distortion, the NSR-S630D is equipped with a newly developed state-of-the-art projection lens. The overall overlay improvements have been made possible not only by minimizing lens distortion through advancements in lens manufacturing techniques, but also by reducing thermal distortion, which is especially important in actual device production. In addition, we have also added a new function for more effective reticle heating distortion compensation. In order to improve wafer grid performance, we newly designed a wafer table with enhanced thermal stability. We have also further improved the reticle bending system in order to minimize the field curvature induced by projection lens thermal aberration. The new features described above, in addition to the matured Streamlign platform, have enabled the NSR-S630D to deliver highest accuracy and stability.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years