Hiroyuki Kataoka
at Hitachi Global Storage Technologies Japan Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 11 May 2009 Paper
Hiroyuki Kataoka, Yoshiyuki Hirayama, Thomas Albrecht, Masahito Kobayashi
Proceedings Volume 7379, 73790K (2009) https://doi.org/10.1117/12.824261
KEYWORDS: Magnetism, Head, Magnetic tracking, Nanoimprint lithography, Interference (communication), Lithography, Manufacturing, Beam propagation method, Optical lithography, Semiconductors

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