Hiroyuki Wada
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper
Ken-Ichiro Mori, Douglas Shelton, Yoshio Goto, Hiromi Suda, Hiroyuki Wada, Hideo Tanaka, Seiya Miura
Proceedings Volume 11613, 116130C (2021) https://doi.org/10.1117/12.2583689
KEYWORDS: Packaging, Optical lithography, Computing systems, Artificial intelligence, Semiconducting wafers, Projection systems, Photoresist materials, Manufacturing equipment, Manufacturing, Image resolution

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