Ms. Hisako Ishikawa Profile

Hisako Ishikawa

at Mitsui Chemicals Inc

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Author

Publications (3)

Proceedings Article | 12 June 2018 Paper

Development of closed-type EUV pellicle

Yosuke Ono, Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Hisako Ishikawa, Tsuneaki Biyajima

Proceedings Volume 10807, 108070I (2018) https://doi.org/10.1117/12.2324819

KEYWORDS: Pellicles, Adhesives, Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Contamination

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Proceedings Article | 16 October 2017 Paper

Development of EUV pellicle for suppression of contamination, haze, and outgas generation

Yosuke Ono, Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Hisako Ishikawa, Tsuneaki Biyajima

Proceedings Volume 10451, 104510Q (2017) https://doi.org/10.1117/12.2280595

KEYWORDS: Pellicles, Extreme ultraviolet, Adhesives, Contamination, Extreme ultraviolet lithography, Air contamination, Deep ultraviolet, Stray light, Reflectivity, Diffusion

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Proceedings Article | 26 September 2016 Paper

Development of a novel closed EUV pellicle for EUVL manufacturing

Yosuke Ono, Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Hisako Ishikawa, Tsuneaki Biyajima

Proceedings Volume 9985, 99850B (2016) https://doi.org/10.1117/12.2241393

KEYWORDS: Pellicles, Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Manufacturing, Silicon, Particles, Protactinium, Semiconducting wafers, Resistance

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