Dr. Hisanori Kambara Profile

Dr. Hisanori Kambara

at Alcatel Vacuum Technology

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 11 May 2009 Paper

Hisanori Kambara, Arnaud Favre, Magali Davenet, Dan Rodier

Proceedings Volume 7379, 73791G (2009) https://doi.org/10.1117/12.824293

KEYWORDS: Photomasks, Air contamination, Contamination, Pellicles, Crystals, Inspection, Ions, Reticles, Semiconducting wafers, Semiconductors

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Keywords/Phrases