Hitomi Fukuda
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Semiconductors, Lithography, Deep ultraviolet, Argon, Gases, Nitrogen, Laser stabilization, Gas lasers, Excimer lasers, Semiconductor manufacturing, Helium, Neon, Krypton, Laser systems engineering

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Lithography, Deep ultraviolet, Ions, Gases, Laser applications, Laser development, Gas lasers, High volume manufacturing, Sustainable technology, Laser systems engineering

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Oscillators, Nitrogen, Manufacturing, Laser applications, Laser development, Excimer lasers, Semiconductor manufacturing, Helium, Neon, Laser systems engineering

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