Dr. Hitomi Satoh
at Holon Co Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | November 9, 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Cadmium, Scanning electron microscopy, Software development, Photomasks, Computed tomography, Optical proximity correction, Raster graphics, Critical dimension metrology, Semiconducting wafers, Holons

PROCEEDINGS ARTICLE | November 9, 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Calibration, Reliability, Very large scale integration, Optical proximity correction, Computer aided design, Critical dimension metrology, Data conversion, Prototyping, Standards development, Holons

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