Hitoshi Suzuki
at Topcon Corp
SPIE Involvement:
Author
Publications (7)

SPIE Journal Paper | 1 October 2007
JM3 Vol. 6 Issue 04
KEYWORDS: Cements, Deep ultraviolet, Adhesives, Transmittance, Objectives, Inspection, Microscopes, Fluorine, Lamps, Excimer lasers

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Imaging systems, Lenses, Image processing, Inspection, Image acquisition, Image quality, Image sensors, Photomasks, Integrated optics, Defect inspection

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Microscopes, Deep ultraviolet, Silica, Calcium, Inspection, Cements, Objectives, Transmittance, Excimer lasers, Adhesives

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Defect detection, Speckle, Sensors, Image processing, Inspection, Optical inspection, Image sensors, Photomasks, Modulation transfer functions, Algorithm development

Proceedings Article | 24 May 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Semiconductors, Electron beams, 3D image reconstruction, Magnetism, Image resolution, 3D metrology, Objectives, Optical simulations, Reconstruction algorithms, 3D image processing

Showing 5 of 7 publications
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