Ho Ann Kek
at Applied Materials South East Asia Pte Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Stereoscopy, Etching, Metals, Copper, Dielectrics, Nondestructive evaluation, Electron microscopes, 3D metrology, Critical dimension metrology, Semiconducting wafers

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