Dr. Ho-Cheol Kim
Research Staff Member at IBM Research - Almaden
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 24 March 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Reticles, Logic, Scanners, Manufacturing, Pellicles, Transmittance, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Chemical elements

Proceedings Article | 1 April 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Gold, Lithography, Optical lithography, Etching, Dry etching, Image processing, Silicon, Photomasks, Directed self assembly, Reactive ion etching

Proceedings Article | 21 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Gold, Thin films, Lithography, Nanostructures, Optical lithography, Polymethylmethacrylate, Polymers, Platinum, Process control, Directed self assembly

Proceedings Article | 20 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Oxides, Lithography, Silicon, Coating, Chromium, Scanning electron microscopy, Directed self assembly, Plasma etching, Picosecond phenomena, Photomicroscopy

Proceedings Article | 20 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Oxides, Lithography, Electron beam lithography, Polymethylmethacrylate, Ultraviolet radiation, Scanning electron microscopy, Directed self assembly, Plasma etching, Picosecond phenomena, Photomicroscopy

Showing 5 of 6 publications
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