Dr. Ho-Chul Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (8)

Proceedings Article | 26 March 2008 Paper
Proceedings Volume 6922, 69222W (2008) https://doi.org/10.1117/12.775811
KEYWORDS: Semiconducting wafers, Overlay metrology, Diffraction, Scatterometry, Spectroscopy, Diffraction gratings, Photomasks, Silicon, Reflectivity, Optical alignment

Proceedings Article | 12 May 2005 Paper
Jangho Shin, SukJoo Lee, Hochul Kim, Chan Hwang, SeongSue Kim, Sang-Gyun Woo, Han-Ku Cho, Joo-Tae Moon
Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.598655
KEYWORDS: Fiber optic illuminators, Reticles, Semiconducting wafers, Image sensors, Photoresist materials, Overlay metrology, Optical lithography, Scanners, Optics manufacturing, Metrology

Proceedings Article | 28 May 2004 Paper
Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.536280
KEYWORDS: Calibration, Lithography, Scanning electron microscopy, Data conversion, Refractive index, Device simulation, Diffusion, Scanners, Instrument modeling, Nanoimprint lithography

Proceedings Article | 28 May 2004 Paper
Ho-Chul Kim, Dong-Seok Nam, Gi-Sung Yeo, Suk-Joo Lee, Sang-Gyun Woo, Han-Ku Cho, Woo-Sung Han
Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.533373
KEYWORDS: Stray light, Scattering, Optical proximity correction, Light scattering, Critical dimension metrology, Optical testing, Electronics, Lithography, Chromium, Optical lithography

Proceedings Article | 26 June 2003 Paper
Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485406
KEYWORDS: Photomasks, Nanoimprint lithography, Phase shifts, Manufacturing, Chlorine, Lithography, Scanners, Semiconducting wafers, Quartz, Scanning electron microscopy

Showing 5 of 8 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top