Dr. Hoang V. Tran
R&D Chemist at Dupont CR&D
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 29 March 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Statistical analysis, Polymers, Light scattering, Materials processing, Control systems, Polymerization, Directed self assembly, Chemical analysis, Molecular self-assembly, Liquids

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Optical lithography, Polymers, Photoresist materials, Microelectronics, Polymerization, Photomasks, Line width roughness, Directed self assembly, Photoresist developing

SPIE Journal Paper | 1 July 2009
JM3 Vol. 8 Issue 03
KEYWORDS: Microfluidics, Water, Microfluidic imaging, Semiconducting wafers, Immersion lithography, Crystals, Liquids, Quartz, Printing, Lithography

Proceedings Article | 12 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Microfluidics, Contamination, Water, Silicon, Extreme ultraviolet, Absorbance, Double patterning technology, Semiconducting wafers, Liquids

Proceedings Article | 26 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Computational fluid dynamics, Refractive index, Microfluidics, Contamination, Diffractive optical elements, Water, Scanners, Absorbance, Immersion lithography, Absorption

Showing 5 of 13 publications
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