Dr. Hoe-Sik Chung Profile

Dr. Hoe-Sik Chung

President MICRO Korea at Rohm and Haas Electronic Materials Korea Ltd

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Publications (2)

Proceedings Article | 12 June 2003 Paper

Thin film type 248-nm bottom antireflective coatings

Tomoyuki Enomoto, Keisuke Nakayama, Kenichi Mizusawa, Yasuyuki Nakajima, Sangwoong Yoon, Yong-Hoon Kim, Young-Ho Kim, Hoesik Chung, Sang Mun Chon

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485060

KEYWORDS: Reflectivity, Photoresist materials, Silicon, Etching, Semiconducting wafers, Lithography, Coating, Plasma etching, Bottom antireflective coatings, Thin films

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Proceedings Article | 23 June 2000 Paper

New development of cost-effective sub-0.18-um lithography with i-line

Hoesik Chung, Jinhang Jung, Youngsun Kim, KwangSoek Choi, NamHee Yoo, Sangwoong Yoon, JeEung Park

Proceedings Volume 3999, (2000) https://doi.org/10.1117/12.388334

KEYWORDS: Ultraviolet radiation, Lithography, Photoresist processing, Critical dimension metrology, Deep ultraviolet, Phase shifts, Photomasks, Photoresist materials, Defect detection, Scanning electron microscopy

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