Dr. Hoe-Sik Chung
President MICRO Korea at Rohm and Haas Electronic Materials Korea Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 June 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Thin films, Lithography, Etching, Silicon, Coating, Reflectivity, Photoresist materials, Plasma etching, Semiconducting wafers, Bottom antireflective coatings

Proceedings Article | 23 June 2000
Proc. SPIE. 3999, Advances in Resist Technology and Processing XVII
KEYWORDS: Lithography, Defect detection, Deep ultraviolet, Ultraviolet radiation, Scanning electron microscopy, Photoresist materials, Photomasks, Critical dimension metrology, Photoresist processing, Phase shifts

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