Holger Hartung
at Friedrich-Schiller-Univ Jena
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 13 March 2007
Proc. SPIE. 6460, Commercial and Biomedical Applications of Ultrafast Lasers VII
KEYWORDS: Refractive index, Femtosecond phenomena, Waveguides, Polarization, Annealing, Crystals, Ions, Diffusion, Electro optics, Nonlinear crystals

Proceedings Article | 20 October 2005
Proc. SPIE. 5965, Optical Fabrication, Testing, and Metrology II
KEYWORDS: Fabrication, Lithography, Optical lithography, Waveguides, Etching, Dry etching, Coating, Photoresist materials, Photomasks, Binary data

Proceedings Article | 20 October 2005
Proc. SPIE. 5965, Optical Fabrication, Testing, and Metrology II
KEYWORDS: Lithography, Electron beam lithography, Diffraction, Holography, Polarization, Free space, Scanning electron microscopy, Near field, Wave propagation, Photomasks

Proceedings Article | 3 November 2003
Proc. SPIE. 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II
KEYWORDS: Fabrication, Lithography, Silica, Calibration, Etching, Semiconductor lasers, Photomasks, Beam shaping, Chemical elements, Photoresist processing

Proceedings Article | 9 November 2001
Proc. SPIE. 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication
KEYWORDS: Fabrication, Optical components, Lithography, Electron beams, Surface roughness, Heat treatments, Semiconductor lasers, Wave propagation, Photomasks, Beam shaping

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