Dr. Holger Kierey
at Carl Zeiss SMT GmbH
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | October 11, 2004
Proc. SPIE. 5488, UV and Gamma-Ray Space Telescope Systems
KEYWORDS: Optical design, Multilayers, Holography, Sensors, Polymers, Coating, Reflectivity, Extreme ultraviolet, Monochromators, Diffraction gratings

PROCEEDINGS ARTICLE | January 29, 2004
Proc. SPIE. 5168, Optics for EUV, X-Ray, and Gamma-Ray Astronomy
KEYWORDS: Reflectors, Mirrors, Polishing, Metrology, X-rays, Geometrical optics, Active optics, Zerodur, Prototyping, Surface finishing

PROCEEDINGS ARTICLE | January 13, 2004
Proc. SPIE. 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications
KEYWORDS: Diffraction, Optical filters, Optical design, Holography, Image segmentation, Coating, Reflectivity, Optical fabrication, Extreme ultraviolet, Diffraction gratings

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