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Holger Westergeling
at Fraunhofer-ILT
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Publications (1)
Proceedings Article | 9 September 2019 Paper
High-precision ultrashort pulsed laser drilling of micro and nano holes using multibeam processing
T. Barthels, M. Reininghaus, H. Westergeling
Proceedings Volume 11107, 111070K (2019) https://doi.org/10.1117/12.2529219
KEYWORDS: Diffractive optical elements, Pulsed laser operation, Laser ablation, Laser drilling, Laser processing, Metals, Laser applications, Picosecond phenomena, Laser sources, Femtosecond phenomena
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