Prof. Hong Chen
at Institute of Physics
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | November 13, 2014
Proc. SPIE. 9277, Nanophotonics and Micro/Nano Optics II
KEYWORDS: Lithography, Nanostructures, Mirrors, Light emitting diodes, Dry etching, Scanning electron microscopy, Photoresist materials, Sapphire, Patterned sapphire substrate, Nanolithography

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