Ms. Hong Lan
at Louisiana Tech Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Mathematical modeling, Interfaces, Silicon, Diffusion, Chemical vapor deposition, Computer simulations, 3D modeling, Convection, Algorithm development, Chemical lasers

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Mathematical modeling, Chemical vapor deposition, 3D modeling, Process control, Microlens, Optical simulations, Chemical reactions, Deposition processes, Optimization (mathematics), Chemical lasers

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