Dr. Hong Xu
at Cornell Univ
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Lithography, Optical lithography, Deep ultraviolet, Nanoparticles, Polymers, Metals, Zinc, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography

SPIE Journal Paper | 8 December 2018
JM3 Vol. 18 Issue 01
KEYWORDS: Nanoparticles, Photoresist materials, Extreme ultraviolet lithography, Oxides, Optical lithography, Lithography, Hafnium, Etching, Metals, Zirconium

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: FT-IR spectroscopy, Optical lithography, Chemical species, Metals, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Hafnium, Zirconium, Photoresist developing

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Oxides, Lithography, Optical lithography, Nanoparticles, Metals, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Zirconium

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Oxides, Lithography, Nanoparticles, Etching, Metals, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Hafnium, Zirconium

Showing 5 of 8 publications
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