Dr. Hong Xu
at Cornell Univ
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 25 March 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Nanoparticles, Photoresist materials, Extreme ultraviolet lithography, Extreme ultraviolet, Deep ultraviolet, Lithography, Zinc, Optical lithography, Metals, Polymers

SPIE Journal Paper | 8 December 2018
JM3 Vol. 18 Issue 01
KEYWORDS: Nanoparticles, Photoresist materials, Extreme ultraviolet lithography, Oxides, Optical lithography, Lithography, Hafnium, Etching, Metals, Zirconium

Proceedings Article | 19 March 2018 Paper
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Extreme ultraviolet lithography, Metals, Zirconium, Photoresist materials, Extreme ultraviolet, Photoresist developing, FT-IR spectroscopy, Optical lithography, Chemical species, Hafnium

Proceedings Article | 19 March 2018 Paper
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Nanoparticles, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Optical lithography, Lithography, Metals, Oxides, Zirconium

Proceedings Article | 19 March 2018 Presentation + Paper
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Nanoparticles, Photoresist materials, Oxides, Extreme ultraviolet lithography, Extreme ultraviolet, Lithography, Etching, Metals, Hafnium, Zirconium

Showing 5 of 8 publications
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