Dr. Hongbo Li
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Semiconductors, Edge detection, Spatial frequencies, Image analysis, Atomic force microscopy, Spatial analysis, Fractal analysis, Line edge roughness, Edge roughness, Correlation function

Proceedings Article | 23 February 2006
Proc. SPIE. 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Edge detection, Lithium, Image processing, Atomic force microscopy, Data processing, Neural networks, Line width roughness, Line edge roughness, Binary data, Edge roughness

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