Dr. Hongbo Li
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 March 2006 Paper
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Line edge roughness, Fractal analysis, Edge roughness, Atomic force microscopy, Image analysis, Edge detection, Spatial frequencies, Semiconductors, Spatial analysis, Correlation function

Proceedings Article | 23 February 2006 Paper
Proc. SPIE. 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Line edge roughness, Line width roughness, Neural networks, Atomic force microscopy, Edge detection, Image processing, Lithium, Data processing, Edge roughness, Binary data

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