The subsurface damage (SSD) introduced by manufacturing procedures are the important factors affecting mechanical
and optical properties of the high-precision optical components. In this paper, we investigated the relationships between
the size of SSD’s micro crack and optical properties by studying on the influence of grinding process parameters
(average abrasive size, grinding force, wheel speed, grinding depth) on the optical properties (transmittance, absorbance,
reflectance) of high-precision optical components first, and then determining the micro crack’s size under the grinding
process parameters. Results indicate that with the increase of average abrasive size, grinding force or grinding depth, the
transmittance of high-precision optical components decreases while the absorbance and reflectance increase. However,
as the wheel speed increases, the transmittance of high-precision optical components increases while the absorbance and
the reflectance decrease. Combining these results with the influence of grinding process parameters on the size of micro
crack, it can be found that with the increase of micro crack’s size, the transmittance will decrease, while the absorbance
and the reflectance will increase.
One important approach to characterize full three-dimensional information is to simulate the etching process of a sample with subsurface damage reversely. The simulation starts from the morphology of the sample at a certain time when the subsurface damage can be opened totally. In the etching experiment, it is possible for us to get the surface morphology at any time. The paper presents a finite difference algorithm to simulate the morphology evolution in an etching process and by the finite difference algorithm the morphology of the sample at a specific time can be given. Comparison of the simulated morphology and measured one provides us the clue of improving the finite difference algorithm. In this paper, the accuracy can be calculated through comparing the simulation with experimental result, and the maximum error of subsurface damage will be calculated.