Dr. Hongwen Sun
at Hohai Univ
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | July 1, 2010
JM3 Vol. 9 Issue 03

PROCEEDINGS ARTICLE | August 21, 2009
Proc. SPIE. 7402, Nanoengineering: Fabrication, Properties, Optics, and Devices VI
KEYWORDS: Electron beam lithography, Optical lithography, Etching, Polymers, Silicon, Electron microscopes, Atomic force microscopy, Ion beams, Nanoimprint lithography, Nanolithography

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