Dr. Hongyuan Cai
R&D Engineer at Synopsys Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 5 April 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical lithography, Manufacturing, 3D modeling, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Electromagnetism, Stochastic processes, EUV optics

Proceedings Article | 20 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Calibration, Manufacturing, Computer simulations, 3D modeling, Photomasks, Source mask optimization, Optical proximity correction, Photoresist processing

Proceedings Article | 24 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Lithium, Photomasks, Computational lithography, Optical proximity correction, SRAF, Chemical elements, 193nm lithography

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