Hosadurga Shobha
at IBM Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 2 July 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Copper, Scatterometry, Machine learning

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Semiconductors, Lithography, Etching, Polymers, Hydrogen, Atomic layer deposition, Photomasks, Self-assembled monolayers, Overlay metrology, Polymer thin films

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