Howard Chen
at Inotera Memories Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 2 April 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Mathematical modeling, Metrology, Phase modulation, Scanners, Control systems, Process control, Optical alignment, Dynamical systems, Semiconducting wafers, Overlay metrology

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Antireflective coatings, Ions, Silicon, Reflectivity, Scanning electron microscopy, Silicon films, Transmittance, Photoresist processing, Semiconducting wafers

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