Dr. Howard A. Padmore
Experimental Systems Group Leader at Lawrence Berkeley National Lab
SPIE Involvement:
Author
Publications (46)

Proceedings Article | 9 September 2019
Proc. SPIE. 11108, Advances in X-Ray/EUV Optics and Components XIV
KEYWORDS: Etching, Argon, Sputter deposition, X-ray diffraction, Silicon, Plasma enhanced chemical vapor deposition, Plasma etching, Plasma, Diffraction gratings

Proceedings Article | 23 August 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Electron beam lithography, X-ray optics, Nanoimprint lithography, Diffraction gratings

Proceedings Article | 15 September 2016
Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI
KEYWORDS: Diffraction, Etching, X-rays, X-ray diffraction, Wet etching, Plasma etching, Extreme ultraviolet lithography, Monochromators, Direct write lithography, Diffraction gratings

SPIE Journal Paper | 12 October 2015
OE Vol. 54 Issue 10
KEYWORDS: Metrology, X-ray optics, Control systems, Mirrors, Humidity, X-rays, Temperature metrology, Interferometry, Calibration, Particles

Proceedings Article | 12 May 2015
Proc. SPIE. 9512, Advances in X-ray Free-Electron Lasers Instrumentation III
KEYWORDS: Electron beams, Light sources, Nose, X-rays, Ions, Semiconductor materials, Quantum efficiency, Space operations, Free electron lasers, X-ray technology

Showing 5 of 46 publications
Conference Committee Involvement (14)
Advances in X-Ray/EUV Optics and Components XIII
20 August 2018 | San Diego, California, United States
Advances in X-Ray/EUV Optics and Components XII
8 August 2017 | San Diego, California, United States
Advances in X-Ray/EUV Optics and Components XI
31 August 2016 | San Diego, California, United States
Advances in X-Ray/EUV Optics and Components X
11 August 2015 | San Diego, California, United States
Advances in X-Ray/EUV Optics and Components IX
19 August 2014 | San Diego, California, United States
Showing 5 of 14 Conference Committees
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