Howon Jung
Ph.D. Student at Yonsei Univ
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Nondestructive evaluation, Photoresist materials, Near field, Lithography, Plasmonics, Process modeling, Finite-difference time-domain method, Photoresist developing, Near field scanning optical microscopy, 3D modeling

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Plasmonics, Finite element methods, Near field scanning optical microscopy, Mechanics, Silicon, Nanolithography, Scanning probe lithography, Microfabrication, Optical lithography

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Metals, Near field optics, Near field, Optical lithography, Plasmonics, Laser development, Nanolithography, Diffraction, Raster graphics, Near field scanning optical microscopy

Proceedings Article | 3 April 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Optical lithography, Lithography, Metals, Silica, Photoresist materials, Plasmonics, Aluminum, Near field, Glasses, Line width roughness

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