Howon Jung
Ph.D. Student at Yonsei Univ
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 21, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Plasmonics, Finite-difference time-domain method, Nondestructive evaluation, 3D modeling, Photoresist materials, Near field scanning optical microscopy, Near field, Photoresist developing, Process modeling

PROCEEDINGS ARTICLE | March 21, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Plasmonics, Optical lithography, Mechanics, Silicon, Scanning probe lithography, Near field scanning optical microscopy, Finite element methods, Microfabrication, Nanolithography

PROCEEDINGS ARTICLE | March 21, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Plasmonics, Diffraction, Optical lithography, Metals, Laser development, Near field scanning optical microscopy, Near field, Raster graphics, Nanolithography, Near field optics

PROCEEDINGS ARTICLE | April 3, 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Plasmonics, Optical lithography, Silica, Metals, Glasses, Photoresist materials, Near field, Line width roughness, Aluminum

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