Dr. Hsiang-Lan Lung
Deputy Director at Macronix
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Image processing, Computing systems, Image filtering, Neural networks, Machine learning, Artificial intelligence, Convolution, Matrix multiplication, Evolutionary algorithms, Neurons

Proceedings Article | 21 March 2017
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Polymethylmethacrylate, Etching, Dry etching, Chalcogenides, Scanning electron microscopy, Atomic layer deposition, Directed self assembly, Plasma etching, Picosecond phenomena, Critical dimension metrology, Reactive ion etching

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