Mr. Hsiao-Chiang Lin
at Powerchip Technology Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Carbon, Thin films, Lithography, Lithium, Optical lithography, Scanners, Photomasks, Double patterning technology, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Reticles, Metrology, Scanners, Error analysis, Diagnostics, Control systems, Process control, Semiconducting wafers, Overlay metrology, Process engineering

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