Hsien-an Chang
at United Microelectronics Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 17, 2005
Proc. SPIE. 5755, Data Analysis and Modeling for Process Control II
KEYWORDS: Deep ultraviolet, Critical dimension metrology, Annealing, Oxides, Double patterning technology, Integrated circuits, Chemical reactions, Process control, Astatine, Microelectronics

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Photomasks, Lithographic illumination, Optical lithography, Logic devices, Optical resolution, Photoresist materials, Manufacturing, Printing, Airborne remote sensing

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