Mr. Hsien-an Chang
at United Microelectronics Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 17, 2005
Proc. SPIE. 5755, Data Analysis and Modeling for Process Control II
KEYWORDS: Oxides, Deep ultraviolet, Annealing, Process control, Microelectronics, Integrated circuits, Double patterning technology, Chemical reactions, Critical dimension metrology, Astatine

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Optical lithography, Lithographic illumination, Manufacturing, Printing, Photoresist materials, Optical resolution, Photomasks, Logic devices, Airborne remote sensing

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