Hsin Cheng Lee
at National Synchrotron Radiation Research Ctr
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 7 June 2002
Proc. SPIE. 4703, Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems
KEYWORDS: Thin films, Scattering, Sputter deposition, Crystals, X-rays, Interfaces, Silicon, Reflectivity, Surface roughness, Tantalum

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