Dr. Hsin-Hua Hu
at Univ of Pittsburgh
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 31 March 2006
Proc. SPIE. 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Thin films, Ferroelectric materials, Capacitors, Resonators, Electrodes, Manufacturing, Capacitance, Aluminum nitride, Zinc oxide, Acoustics

Proceedings Article | 31 December 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Electronics, Sensors, Etching, Silicon, Manufacturing, Finite element methods, Photomasks, Reactive ion etching, Semiconducting wafers, Prototyping

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