Hsin Chang
Graduate Student at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Wafer-level optics, Polymers, Particles, Digital watermarking, Scanning electron microscopy, Printing, Immersion lithography, Neodymium, Semiconducting wafers, Defect inspection

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Reticles, Data modeling, Sensors, Calibration, Image processing, Scanners, Data acquisition, Image sensors, Critical dimension metrology, Semiconducting wafers

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