Dr. Hsinyu Tsai
Research Staff Member at IBM Research - Almaden
SPIE Involvement:
Conference Program Committee | Author
Publications (16)

Proceedings Article | 16 August 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Lithography, Neural networks, Structural design, Applied physics, Analog electronics, Algorithm development, Digital electronics, Computer architecture, Tolerancing, Evolutionary algorithms

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Logic, Optical lithography, Etching, Metals, Silicon, Manufacturing, Extreme ultraviolet, Directed self assembly, Plasma etching, Optical alignment, Critical dimension metrology, Line edge roughness, Nanofabrication

Proceedings Article | 21 March 2017
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Polymethylmethacrylate, Etching, Dry etching, Chalcogenides, Scanning electron microscopy, Atomic layer deposition, Directed self assembly, Plasma etching, Picosecond phenomena, Critical dimension metrology, Reactive ion etching

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Semiconductors, Lithography, Etching, Polymers, Silicon, Manufacturing, Oxygen, Line width roughness, Directed self assembly, Line edge roughness, Plasma

Proceedings Article | 22 March 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Etching, Image processing, Silicon, Directed self assembly, Line edge roughness, Neodymium

Showing 5 of 16 publications
Conference Committee Involvement (4)
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
23 February 2020 | San Jose, California, United States
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2019
25 February 2019 | San Jose, California, United States
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
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