Dr. Hsing-Chieh Lee Profile

Dr. Hsing-Chieh Lee

Asst. Supervisor at Everlight Chemical Industrial Corpoation

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Publications (1)

Proceedings Article | 27 March 2017 Paper

Chemically amplified i-line positive resist for next-generation flat panel display

Hsing-Chieh Lee, Ying-Hao Lu, Shin-Yih Huang, Wei-Jen Lan, Makoto Hanabata

Proceedings Volume 10146, 101461G (2017) https://doi.org/10.1117/12.2255875

KEYWORDS: Photoresist materials, Flat panel displays, Array processing, LCDs, Resolution enhancement technologies, Photoresist processing, Silicon, Semiconducting wafers, Wet etching, Coating, Glasses, Molecules

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