Hsuan-Ping Lee
at UIUC
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 2 April 2014 Paper
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Calibration, Lithography, Scatterometry, Semiconducting wafers, Light scattering, 3D modeling, Diffraction, Scattering, Photoresist processing, Process control

Proceedings Article | 28 March 2014 Paper
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Line edge roughness, Critical dimension metrology, Electron beam lithography, Lithography, Optical lithography, Transistors, Electrons, Semiconducting wafers, Tolerancing, Directed self assembly

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