Dr. Hsuen-Li Chen
at National Taiwan Univ
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 5 May 2008
Proc. SPIE. 7002, Photonics for Solar Energy Systems II
KEYWORDS: Gold, Refractive index, Antireflective coatings, Nanoparticles, Etching, Solar cells, Silicon, Reflectivity, Wet etching, Semiconducting wafers

Proceedings Article | 16 April 2008
Proc. SPIE. 6999, Organic Optoelectronics and Photonics III
KEYWORDS: Thin films, Photovoltaics, Refractive index, Organic photovoltaics, Annealing, Solar cells, Crystals, Interfaces, Reflectivity, Absorption

Proceedings Article | 5 December 2006
Proc. SPIE. 6333, Organic Light Emitting Materials and Devices X
KEYWORDS: Reflection, Organic light emitting diodes, Metals, Silver, Reflectivity, Control systems, Organic materials, Aluminum, Destructive interference, Absorption

Proceedings Article | 24 July 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Lithography, Antireflective coatings, Copper, Interfaces, Silicon, Reflectivity, Silicon films, Aluminum, Resolution enhancement technologies, Bottom antireflective coatings

Proceedings Article | 16 July 2002
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Statistical analysis, Reflection, Metals, Reflectivity, Computer simulations, Mass spectrometry, Photoresist materials, Microwave radiation, Plasma, Bottom antireflective coatings

Showing 5 of 15 publications
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