Hua-Chen Hsu
Associate Engineer at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | August 2, 2004
Proc. SPIE. 5531, Interferometry XII: Techniques and Analysis
KEYWORDS: Actuators, Beam splitters, Light sources, Interferometers, Interferometry, Phase interferometry, Profiling, Objectives, Algorithm development, Phase shifts

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