Dr. Hua Chen
at Schlumberger-Doll Research Ctr
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 February 2008
Proc. SPIE. 6886, Microfluidics, BioMEMS, and Medical Microsystems VI
KEYWORDS: Fabrication, Microelectromechanical systems, Microfluidics, Sensors, Capillaries, Silicon, Transducers, Microfabrication, Semiconducting wafers, Temperature metrology

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